84313920 (01/1998-12/1998) Parts of automatic material handling machines for transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other material for semiconductor devices, n.e.s.
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84313920 (01/1998-12/1998) Parts of automatic material handling machines for transport, handling and storage of semiconductor wafers, wafer cassettes, wafer boxes and other material for semiconductor devices, n.e.s.